薄膜电容湿度传感器结构：

Upper electrode 上层电极

• conductive material 传导材料

• protects the active material of the sensor from dust, dirt and conductive particles 保护传感器的主要材料不受灰尘 , 污垢和导电粒子 的影响

• lets through water vapor 使水蒸汽通过 • functions as one of the two electrodes in a capacitor 做为电容两极中 的一极

Active material 活性材料

• active polymer film 活性聚合物薄膜

• absorbs water vapor: amount is a function of ambient relative humidity 吸收水蒸汽 : 吸收量和周围环境的相对湿度有函数关系 Lower electrode 下层电极

• made of conductive material 由传导材料做成 • functions as one of the two electrodes in a capacitor 做为电容两极中 的一极 Glass substrate 玻璃基底

• base that supports the sensor structure 支撑传感器结构